Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
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Title
Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
Authors
Keywords
Impurity incorporation, Methane concentration dependence, DFT calculation, CVD growth, Boron-doped single crystal diamond
Journal
CARBON
Volume 172, Issue -, Pages 463-473
Publisher
Elsevier BV
Online
2020-10-22
DOI
10.1016/j.carbon.2020.10.061
References
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