Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery

Title
Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 47, Issue -, Pages 27-34
Publisher
Elsevier BV
Online
2014-05-15
DOI
10.1016/j.diamond.2014.05.002

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