High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser
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Title
High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser
Authors
Keywords
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Journal
OPTICS LETTERS
Volume 46, Issue 2, Pages 384
Publisher
The Optical Society
Online
2020-12-11
DOI
10.1364/ol.411412
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