期刊
OPTICS LETTERS
卷 46, 期 2, 页码 384-387出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.411412
关键词
-
类别
资金
- [687880]
The study reported on high-quality, high-throughput laser milling of silicon with a sub-ps laser delivering over 1 kW of average power. By adjusting the processing strategy and parameters, smooth surfaces with low roughness were achieved while maintaining a high material removal rate.
We report on high-quality high-throughput laser milling of silicon with a sub-ps laser delivering more than 1 kW of average laser power on the workpiece. In order to avoid heat accumulation effects, the processing strategy for high-quality laser milling was adapted to the available average power by using five-pulse bursts, a large beam diameter of 372 mu m to limit the peak fluence per pulse to approximately 0.7 J/cm(2), and a high feed rate of 24 m/s. As a result, smooth surfaces with a low roughness of S-a <= 0.6 mu m were achieved up to the investigated milling depth of 313 mu m while maintaining a high material removal rate of 230 mm(3)/min. (C) 2021 Optical Society of America
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据