Raman scattering study of nanoscale Mo/Si and Mo/Be periodic multilayer structures

Published 2020 View Full Article

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Title
Raman scattering study of nanoscale Mo/Si and Mo/Be periodic multilayer structures
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 6, Pages 063408
Publisher
American Vacuum Society
Online
2020-10-16
DOI
10.1116/6.0000408

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