Raman scattering study of nanoscale Mo/Si and Mo/Be periodic multilayer structures

标题
Raman scattering study of nanoscale Mo/Si and Mo/Be periodic multilayer structures
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 6, Pages 063408
出版商
American Vacuum Society
发表日期
2020-10-16
DOI
10.1116/6.0000408

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