Phase leading active disturbance rejection control for a nanopositioning stage
Published 2021 View Full Article
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Title
Phase leading active disturbance rejection control for a nanopositioning stage
Authors
Keywords
Piezoelectric actuators, Nanopositioning, Hysteresis, ADRC, Leading phase
Journal
ISA TRANSACTIONS
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2021-01-07
DOI
10.1016/j.isatra.2021.01.004
References
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