Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film
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Title
Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film
Authors
Keywords
Diamond, Magnetic sensors, MEMS
Journal
CARBON
Volume 170, Issue -, Pages 294-301
Publisher
Elsevier BV
Online
2020-08-25
DOI
10.1016/j.carbon.2020.08.049
References
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