Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film
出版年份 2020 全文链接
标题
Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film
作者
关键词
Diamond, Magnetic sensors, MEMS
出版物
CARBON
Volume 170, Issue -, Pages 294-301
出版商
Elsevier BV
发表日期
2020-08-25
DOI
10.1016/j.carbon.2020.08.049
参考文献
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