Impact of surface defects in electron beam evaporated ZnO thin films on FET biosensing characteristics towards reliable PSA detection
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Title
Impact of surface defects in electron beam evaporated ZnO thin films on FET biosensing characteristics towards reliable PSA detection
Authors
Keywords
ZnO, Thin film, FET, Biosensor, Defects, Roughness
Journal
APPLIED SURFACE SCIENCE
Volume 537, Issue -, Pages 147895
Publisher
Elsevier BV
Online
2020-09-18
DOI
10.1016/j.apsusc.2020.147895
References
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