A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors

Title
A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors
Authors
Keywords
-
Journal
Micromachines
Volume 11, Issue 10, Pages 925
Publisher
MDPI AG
Online
2020-10-05
DOI
10.3390/mi11100925

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