Journal
SENSORS
Volume 20, Issue 17, Pages -Publisher
MDPI
DOI: 10.3390/s20174942
Keywords
porous silicon sensor; sensor conductivity type; porous silicon layer thickness; resistive sensor
Funding
- CONACYT [319362]
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We studied the influences of the thickness of the porous silicon layer and the conductivity type on the porous silicon sensors response when exposed to ethanol vapor. The response was determined at room temperature (27 degrees C) in darkness using a horizontal aluminum electrode pattern. The results indicated that the intensity of the response can be directly or inversely proportional to the thickness of the porous layer depending on the conductivity type of the semiconductor material. The response of the porous sensors was similar to the metal oxide sensors. The results can be used to appropriately select the conductivity of semiconductor materials and the thickness of the porous layer for the target gas.
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