Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity

标题
Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity
作者
关键词
-
出版物
SENSORS
Volume 20, Issue 17, Pages 4942
出版商
MDPI AG
发表日期
2020-09-01
DOI
10.3390/s20174942

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