Defect structure and strain reduction of 3C-SiC/Si layers obtained with the use of a buffer layer and methyltrichlorosilane addition

Title
Defect structure and strain reduction of 3C-SiC/Si layers obtained with the use of a buffer layer and methyltrichlorosilane addition
Authors
Keywords
-
Journal
CRYSTENGCOMM
Volume 18, Issue 15, Pages 2770-2779
Publisher
Royal Society of Chemistry (RSC)
Online
2016-03-10
DOI
10.1039/c6ce00280c

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