Epitaxial Atomic Layer Deposition of Sn-Doped Indium Oxide

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Title
Epitaxial Atomic Layer Deposition of Sn-Doped Indium Oxide
Authors
Keywords
-
Journal
CRYSTAL GROWTH & DESIGN
Volume 16, Issue 2, Pages 640-645
Publisher
American Chemical Society (ACS)
Online
2015-10-24
DOI
10.1021/acs.cgd.5b01086

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