Selective generation of excited species in ns pulse / RF hybrid plasmas for plasma chemistry applications

Published 2020 View Full Article

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Title
Selective generation of excited species in ns pulse / RF hybrid plasmas for plasma chemistry applications
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2020-08-29
DOI
10.1088/1361-6595/abb3a1

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