Selective generation of excited species in ns pulse / RF hybrid plasmas for plasma chemistry applications

标题
Selective generation of excited species in ns pulse / RF hybrid plasmas for plasma chemistry applications
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2020-08-29
DOI
10.1088/1361-6595/abb3a1

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