4.7 Article

Highly sensitive magnetic field microsensor based on direct laser writing of fiber-tip optofluidic Fabry-Perot cavity

Journal

APL PHOTONICS
Volume 5, Issue 7, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/5.0012988

Keywords

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Funding

  1. Major Scientific Facilities Project Funding in Zhejiang Lab [2019MB0AD01]
  2. China Scholarship Council (CSC) [201806325026]
  3. 111 Project [D20031]
  4. National Natural Science Foundation of China [61203190]
  5. Natural Science Foundation of Zhejiang Province [LY17F030010]

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In this paper, a polymer micro-Fabry-Perot interferometer (FPI) fabricated via direct laser writing using two-photon polymerization techniques on a single mode fiber tip is proposed, designed, simulated, and experimentally demonstrated as a magnetic field probe. The sensor comprises a tapered waveguide with a length of 100 mu m and a diameter of 1 mu m along the axis connecting the two reflecting surfaces of the micro-FPI open cavity. The cavity is filled with a magnetic fluid (MF) changing the evanescent coupling and consequently leading to a change in the phase of the FPI. To improve the signal reflection, a thin layer of Au is coated on the device before fabricating the probe sensor, which is then sealed in a MF-filled glass tube. The experimental results show that the proposed probe sensor has a low temperature sensitivity and a sensitivity to magnetic field as high as 1.54 nm/mT, and the magnetic field measurement accuracy is similar to 649.4 mu T within a range from 1 mT to 8 mT. The microsensor, which is very stable and easy to fabricate, can be used as a probe to detect weak magnetic fields.

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