Journal
COATINGS
Volume 10, Issue 6, Pages -Publisher
MDPI
DOI: 10.3390/coatings10060577
Keywords
DC reactive magnetron sputtering; WO(3)thin film; crystallinity; electrochromic; substrate temperature
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Funding
- Guangdong Special Support Program [2019BT02C629]
- Scientific Research Fund of Guangdong Province [2016A030312015]
- GDAS'Project of Science Technology Development [2018 GDASCX-0402]
- GDAS' Talent Introduction Project [2020GDASYL-20200103110]
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Tungsten oxide (WO3) is widely used as a functional material for smart windows due to its excellent electrochromic properties, however it is difficult to overcome the conflict between its optical modulation and cyclic stability. In this work, WO(3)thin films with different crystal structures were prepared by DC reactive magnetron sputtering method. The effects of substrate temperature on the structure, composition, and electrochromic properties of WO(3)films were investigated. The results show that the crystallinity of the WO(3)film increases with increasing deposition temperature, indicating that temperature plays an important role in controlling the structure of the WO(3)film. For WO(3)thin films formed at a substrate temperature of 573 K, the film is in an amorphous state to a crystalline transition state. From X-ray diffraction (XRD) analysis, the thin film showed a weak WO(3)crystallization peak, which was in the composite structure of amorphous and nanocrystalline. Which has the best electrochromic properties, with modulation amplitude of 73.1% and bleached state with a coloration efficiency of 42.9 cm(2)/C at a wavelength of 550 nm. Even after 1500 cycles, the optical modulation still contains 65.4%, delivering the best cyclic stability.
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