Microstructure, mechanical and tribological properties of Hf-Mo-Si-N films with different Si contents

Published 2020 View Full Article

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Title
Microstructure, mechanical and tribological properties of Hf-Mo-Si-N films with different Si contents
Authors
Keywords
Hf-Mo-Si-N films, Microstructure, Magnetron sputtering, Mechanical and tribological properties
Journal
SURFACE & COATINGS TECHNOLOGY
Volume -, Issue -, Pages 126268
Publisher
Elsevier BV
Online
2020-08-08
DOI
10.1016/j.surfcoat.2020.126268

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