The microstructure and tribological properties of molybdenum and silicon nitride composite films

Published 2020 View Full Article

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Title
The microstructure and tribological properties of molybdenum and silicon nitride composite films
Authors
Keywords
Magnetron sputtering, Mo-Si-N films, Wear resistance enhancement
Journal
SURFACE & COATINGS TECHNOLOGY
Volume -, Issue -, Pages 126238
Publisher
Elsevier BV
Online
2020-07-28
DOI
10.1016/j.surfcoat.2020.126238

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