Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition

Published 2020 View Full Article

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Title
Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition
Authors
Keywords
ZrO, 2, thin films, 316L stainless steel, AFM, XRD, Hardness, Corrosion resistance
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 393, Issue -, Pages 125821
Publisher
Elsevier BV
Online
2020-04-22
DOI
10.1016/j.surfcoat.2020.125821

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