Role of nonlocal thermoelastic peaks in the stress and texture evolution of TiN coatings formed by plasma based ion implantation and deposition

Published 2020 View Full Article

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Title
Role of nonlocal thermoelastic peaks in the stress and texture evolution of TiN coatings formed by plasma based ion implantation and deposition
Authors
Keywords
Plasma immersion ion implantation assisted deposition, Pulsed bias potential, Nitride coating, Nonlocal thermoelastic peak, Compressive stress, Texture
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 391, Issue -, Pages 125695
Publisher
Elsevier BV
Online
2020-03-26
DOI
10.1016/j.surfcoat.2020.125695

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