Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode

Published 2020 View Full Article

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Title
Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 4, Pages 452-454
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-05-16
DOI
10.1109/jmems.2020.2992673

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