Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode

标题
Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 4, Pages 452-454
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2020-05-16
DOI
10.1109/jmems.2020.2992673

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