GaN substrates having a low dislocation density and a small off-angle variation prepared by hydride vapor phase epitaxy and maskless-3D

Title
GaN substrates having a low dislocation density and a small off-angle variation prepared by hydride vapor phase epitaxy and maskless-3D
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 59, Issue 7, Pages 071007
Publisher
IOP Publishing
Online
2020-06-17
DOI
10.35848/1347-4065/ab9d5f

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