MEMS Mirrors for LiDAR: A Review

Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation

(2020) Quentin Tanguy et al.   OPTICS EXPRESS

Extreme angle, tip-tilt MEMS micromirror enabling full hemispheric, quasi-static optical coverage

(2019) C. Pollock et al.   OPTICS EXPRESS

An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

(2019) Liang Zhou et al.   Micromachines

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

(2019) Karlmarx G. K. Periyasamy et al.   Micromachines

The effect of closed-loop optimization enhances the MEMS lidar for rapid scanning

(2019) Yunxi Li et al.   OPTIK

Photonic integrated circuit based FMCW coherent LiDAR

(2018) Aude Martin et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

3D visual perception for self-driving cars using a multi-camera system: Calibration, mapping, localization, and obstacle detection

(2017) Christian Häne et al.   IMAGE AND VISION COMPUTING

5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application

(2017) Liangchen Ye et al.   SENSORS

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application

(2017) Fanya Li et al.   Micromachines

Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application

(2017) Liangchen Ye et al.   Micromachines

Lidar that will make self-driving cars affordable [News]

(2016) Evan Ackerman   IEEE SPECTRUM

Line scanning time-of-flight laser sensor for intelligent transport systems, combining wide field-of-view optics of 30 deg, high scanning speed of 0.9 ms / line , and simple sensor configuration

(2016) Masaharu Imaki et al.   OPTICAL ENGINEERING

Wide-angle structured light with a scanning MEMS mirror in liquid

(2016) Xiaoyang Zhang et al.   OPTICS EXPRESS

Electrothermal MEMS fiber scanner for optical endomicroscopy

(2016) Yeong-Hyeon Seo et al.   OPTICS EXPRESS

LIDAR pulse coding for high resolution range imaging at improved refresh rate

(2016) Gunzung Kim et al.   OPTICS EXPRESS

Simultaneous piston position and tilt angle sensing for large vertical displacement micromirrors by frequency detection inductive sensing

(2015) V. F.-G. Tseng et al.   APPLIED PHYSICS LETTERS

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

(2015) Andrew C.-L. Hung et al.   SENSORS AND ACTUATORS A-PHYSICAL

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

(2015) Xiaoyang Zhang et al.   Micromachines

Large aperture at low cost three-dimensional time-of-flight range sensor using scanning micromirrors and synchronous detector switching

(2014) Siegwart Bogatscher et al.   APPLIED OPTICS

MEMS Laser Scanners: A Review

(2014) Sven T. S. Holmstrom et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Two-dimensional apodized silicon photonic phased arrays

(2014) Jie Sun et al.   OPTICS LETTERS

Now You See It… Now You Don’t: Understanding Airborne Mapping LiDAR Collection and Data Product Generation for Archaeological Research in Mesoamerica

(2014) Juan Fernandez-Diaz et al.   Remote Sensing

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

(2013) Ulrich Hofmann et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Large-scale nanophotonic phased array

(2013) Jie Sun et al.   NATURE

A Two-Dimensional Laser Scanning Mirror Using Motion-Decoupling Electromagnetic Actuators

(2013) Bu Shin et al.   SENSORS

A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator

(2013) Wenjing Liu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Resonant PZT MEMS Scanner for High-Resolution Displays

(2012) Utku Baran et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A dual-axis pointing mirror with moving-magnet actuation

(2012) Çağlar Ataman et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

(2012) Chung-De Chen et al.   OPTICS EXPRESS

Design and characterization of a 256x64-pixel single-photon imager in CMOS for a MEMS-based laser scanning time-of-flight sensor

(2012) Cristiano Niclass et al.   OPTICS EXPRESS

Miniaturized all-optical photoacoustic microscopy based on microelectromechanical systems mirror scanning

(2012) Sung-Liang Chen et al.   OPTICS LETTERS

High-Q MEMS Resonators for Laser Beam Scanning Displays

(2012) Ulrich Hofmann et al.   Micromachines

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

(2011) Yiping Zhu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator

(2009) Karel Van Acoleyen et al.   OPTICS LETTERS

A Review of Phased Array Steering for Narrow-Band Electrooptical Systems

(2009) Paul F. McManamon et al.   PROCEEDINGS OF THE IEEE

A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors

(2009) Chi Zhang et al.   SENSORS

Long-range transport of aerosols from agriculture crop residue burning in Indo-Gangetic Plains—A study using LIDAR, ground measurements and satellite data

(2008) K.V.S. Badarinath et al.   JOURNAL OF ATMOSPHERIC AND SOLAR-TERRESTRIAL PHYSICS