High-Q MEMS Resonators for Laser Beam Scanning Displays

Published 2012 View Full Article

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Title
High-Q MEMS Resonators for Laser Beam Scanning Displays
Authors
Keywords
-
Journal
Micromachines
Volume 3, Issue 2, Pages 509-528
Publisher
MDPI AG
Online
2012-06-06
DOI
10.3390/mi3020509
References
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