Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography
Published 2020 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography
Authors
Keywords
-
Journal
Nature Communications
Volume 11, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2020-05-11
DOI
10.1038/s41467-020-15678-y
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
- (2019) Oscar Versolato PLASMA SOURCES SCIENCE & TECHNOLOGY
- Efficient Generation of Extreme Ultraviolet Light From Nd :YAG-Driven Microdroplet-Tin Plasma
- (2019) R. Schupp et al. Physical Review Applied
- Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma
- (2019) R. Schupp et al. APPLIED PHYSICS LETTERS
- Power-law scaling of plasma pressure on laser-ablated tin microdroplets
- (2018) Dmitry Kurilovich et al. PHYSICS OF PLASMAS
- High-energy Nd:YAG laser system with arbitrary sub-nanosecond pulse shaping capability
- (2017) R. A. Meijer et al. OPTICS LETTERS
- Atomic structure considerations for the low-temperature opacity of Sn
- (2017) J. Colgan et al. High Energy Density Physics
- Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics
- (2017) Qiushi Huang et al. Applied Physics Reviews
- Evolution analysis of EUV radiation from laser-produced tin plasmas based on a radiation hydrodynamics model
- (2017) M. G. Su et al. Scientific Reports
- The chips are down for Moore’s law
- (2016) M. Mitchell Waldrop NATURE
- On the maximum conversion efficiency into the 13.5-nm extreme ultraviolet emission under a steady-state laser ablation of tin microspheres
- (2016) M. M. Basko PHYSICS OF PLASMAS
- The Los Alamos suite of relativistic atomic physics codes
- (2015) C J Fontes et al. JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS
- Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range
- (2015) S.J. Goh et al. OPTICS EXPRESS
- On the structure of quasi-stationary laser ablation fronts in strongly radiating plasmas
- (2015) M. M. Basko et al. PHYSICS OF PLASMAS
- Quasi-Moseley's law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions
- (2014) Hayato Ohashi et al. APPLIED PHYSICS LETTERS
- Compact x-ray microscope for the water window based on a high brightness laser plasma source
- (2012) H. Legall et al. OPTICS EXPRESS
- One-dimensional study of the radiation-dominated implosion of a cylindrical tungsten plasma column
- (2012) M M Basko et al. PLASMA PHYSICS AND CONTROLLED FUSION
- Physical processes in EUV sources for microlithography
- (2011) V Y Banine et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source
- (2010) Akira Sasaki et al. JOURNAL OF APPLIED PHYSICS
- EUV emission spectra in collisions of multiply charged Sn ions with He and Xe
- (2010) H Ohashi et al. JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS
- Lithography at EUV wavelengths
- (2010) Greg Tallents et al. Nature Photonics
- Detailed investigations on radiative opacity and emissivity of tin plasmas in the extreme-ultraviolet region
- (2010) Jiaolong Zeng et al. PHYSICAL REVIEW E
- Lithography gets extreme
- (2009) Christian Wagner et al. Nature Photonics
- Spectra of rubidium-like Pd X-Sn XIV ions
- (2008) A. N. Ryabtsev et al. OPTICS AND SPECTROSCOPY
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExplorePublish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn More