3D defect distribution detection by coaxial transmission dark-field microscopy

Published 2019 View Full Article

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Title
3D defect distribution detection by coaxial transmission dark-field microscopy
Authors
Keywords
Dark-field microscopy, Defect detection, 3D distribution reconstruction, Illuminated background light, Axial light intensity analysis
Journal
OPTICS AND LASERS IN ENGINEERING
Volume 127, Issue -, Pages 105988
Publisher
Elsevier BV
Online
2019-12-18
DOI
10.1016/j.optlaseng.2019.105988

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