3D defect distribution detection by coaxial transmission dark-field microscopy

出版年份 2019 全文链接

标题

作者

关键词

Dark-field microscopy, Defect detection, 3D distribution reconstruction, Illuminated background light, Axial light intensity analysis

出版物

OPTICS AND LASERS IN ENGINEERING

Volume 127, Issue -, Pages 105988

出版商

Elsevier BV

发表日期

2019-12-18

DOI

10.1016/j.optlaseng.2019.105988

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