Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

Published 2020 View Full Article

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Title
Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples
Authors
Keywords
Polyimide, Atomic layer deposition (ALD), Flexible microelectrode arrays (Flex-MEAs), Passivation
Journal
MICROELECTRONIC ENGINEERING
Volume 227, Issue -, Pages 111315
Publisher
Elsevier BV
Online
2020-04-11
DOI
10.1016/j.mee.2020.111315

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