Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

标题
Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples
作者
关键词
Polyimide, Atomic layer deposition (ALD), Flexible microelectrode arrays (Flex-MEAs), Passivation
出版物
MICROELECTRONIC ENGINEERING
Volume 227, Issue -, Pages 111315
出版商
Elsevier BV
发表日期
2020-04-11
DOI
10.1016/j.mee.2020.111315

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