Article
Materials Science, Multidisciplinary
Da Yin, Qi Wang, Shihao Zhang, Baimei Tan, Fan Yang, Ru Wang, Xiaoqin Sun, Mengrui Liu
Summary: A new type of alkaline cleaning solution based on EDTA was proposed to remove TAZ contaminants on copper surface effectively, with optimal concentration ratio and pH value explored through experiments and theoretical analysis.
MATERIALS RESEARCH BULLETIN
(2021)
Article
Chemistry, Analytical
Liu Yang, Da Yin, Baimei Tan, Wenqian Zhang, Tiecheng Han, Peng Zhao, Tongju Wang, Yawen Liu
Summary: This paper proposes a new alkaline cleaning solution based on a composite complexing agent for the removal of benzotriazole (BTA). The experimental results show that the cleaning solution can effectively remove BTA residue on copper surfaces and achieve a lower surface roughness after cleaning.
JOURNAL OF ELECTROANALYTICAL CHEMISTRY
(2022)
Article
Chemistry, Physical
Shihao Zhang, Yazhen Wang, Baimei Tan, Fangyuan Wang, Xiaolong Wang, Haoyu Du
Summary: This study revealed the effect and mechanism of lysine, serine, and proline on the removal of benzotriazole (BTA) during post-chemical mechanical polishing (CMP) cleaning. Experimental results showed that lysine, serine, and proline enhanced the cleaning efficiency of BTA by 97.1%, 96.7%, and 94.1% respectively, with almost the same concentration. UV-visible absorption spectrum confirmed that lysine had slightly better complexing ability. Molecular dynamics simulations demonstrated that lysine exhibited the lowest adsorption energy of -30.24 eV when absorbed on the Cu (1 1 1) surface.
JOURNAL OF MOLECULAR LIQUIDS
(2023)
Article
Chemistry, Physical
Wei Li, Baimei Tan, Shihao Zhang, Baohong Gao, Boao Ma, Lei Guo, Haoyu Du, Fangyuan Wang, Xiaolong Wang
Summary: With the continuous miniaturization of semiconductor integrated circuits, the development of chemical mechanical polishing (CMP) technology for copper interconnection has been promoted, and there are more stringent requirements and challenges for post-CMP cleaning technology. A novel and efficient alkaline cleaning solution based on TEAOH, Glu, and PVP is proposed for post-CMP cleaning of copper. The solution effectively removes BTA and achieves a nearly defect-free clean surface.
JOURNAL OF MOLECULAR LIQUIDS
(2023)
Article
Chemistry, Physical
Yuanshen Cheng, Shengli Wang, Hongliang Li, Chenwei Wang, Yundian Yang, Shuangshuang Lei, Sen Li
Summary: This study characterized the particle removal efficiency and investigated the mechanism of various cleaning solutions on cobalt surfaces, demonstrating the importance of citric acid and fatty alcohol polyethylene ether in cleaning effects. Additionally, a novel method for wettability characterization was proposed, laying a foundation for characterizing droplet dynamics on solid surfaces in various disciplines.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2021)
Article
Engineering, Electrical & Electronic
Junghwan Song, Kihong Park, Sanghuck Jeon, Jaewon Lee, Taesung Kim
Summary: A novel post-CMP cleaning solution consisting of TMAH, EDTA, and Disponil was developed to effectively remove residual ceria nanoparticles from polished SiO2 and Si3N4 films. The cleaning solution showed high removal efficiency and better surface quality protection compared to conventional cleaning solutions such as SC1 and SPM.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2022)
Article
Materials Science, Multidisciplinary
Jing Wang, Baohong Gao, Nannan Zhang, Han Yan
Summary: This study investigates the removal of benzotriazole (BTA), a common corrosion inhibitor in the chemical mechanical polishing (CMP) process. N,N'-bis(3-aminopropyl)-1,2-ethanediamine (TAD) and pyrazole (PZ) are used as the main components in an alkaline cleaning solution, with fatty alcohol polyoxy ethylene ether (JFCE) as an auxiliary surfactant. The optimized cleaning solution shows good performance in removing BTA, as verified by contact angle measurements, X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM).
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
(2023)
Article
Chemistry, Physical
Xiaoqin Sun, Shihao Zhang, Mengrui Liu, Baimei Tan, Yangang He, Da Yin, Pengcheng Gao, Yazhen Wang
Summary: In this study, TMAH and three complexing agents were used to remove the organic residue on cobalt surface, and the cleaning effect was characterized by contact angle, electrochemistry, AFM, and XPS. The cleaning mechanism was further revealed by molecular dynamics simulation based on DFT.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2021)
Article
Chemistry, Physical
Samrina Sahir, Nagendra Prasad Yerriboina, So-Young Han, Kwang-Min Han, Tae-Gon Kim, Niraj Mahadev, Jin-Goo Park
Summary: The research found that the removal of ceria particles is more difficult under certain pH conditions, and only specific chemical cleaning methods are effective in removing ceria particles.
APPLIED SURFACE SCIENCE
(2021)
Article
Chemistry, Physical
Mei Yan, Baimei Tan, Shihao Zhang, Wei Li, Jinbo Ji, Zhi Liu, Li Huang, Fangyuan Wang, Xiaolong Wang, Haoyu Du
Summary: In this study, the cleaning effect of three complexing agents, glycine, EDTA, and TAD, on ceria particles on the polished silicon dioxide surface were investigated. The results showed that EDTA, at a concentration of 0.15 wt% and pH 11, can remove 99% of ceria particles from the substrate. The proposed removal mechanism involves the undercutting effect of carboxyl functional groups, breaking the Ce-O-Si chemical connection and enhancing the electrostatic repulsion force between the CeO2 and SiO2 substrate.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2023)
Article
Engineering, Electrical & Electronic
Liu Yang, Da Yin, Wenqian Zhang, Tiecheng Han, Peng Zhao, Tongju Wang, Limin Cheng
Summary: Efficient cleaning solution plays an important role in removing contamination after CMP, especially in the removal of colloidal silica particles. The optimized cleaning solution composed of 150 ppm FA/OII, 1500 ppm AEO-15 and 1000 ppm ADS can effectively eliminate residual particles and improve surface quality.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Engineering, Electrical & Electronic
Samrina Sahir, Nagendra Prasad Yerriboina, So-Young Han, Tae-Gon Kim, Niraj Mahadev, Jin-Goo Park
Summary: The removal of ceria during the STI post-CMP cleaning has become a serious concern in the semiconductor industry. Research found that polishing results in more contamination of ceria on oxide surfaces and the strength of adhesion increases as ceria particle size decreases, with different cleaning methods needed based on the size of the ceria particles.
MICROELECTRONIC ENGINEERING
(2021)
Article
Materials Science, Multidisciplinary
Chi-Hsiang Hsieh, Ming-Hsun Lee, Chao-Chang A. Chen, Chang-Ching Tu, Hao-Chung Kuo
Summary: This article investigates methods for reducing metal contamination and surface particle contamination on SiC substrates. It was found that different commercial CMP slurries can result in different contamination levels, and adding a scrubber cleaning step before the traditional cleaning process can significantly reduce contamination.
MATERIALS RESEARCH EXPRESS
(2023)
Article
Materials Science, Multidisciplinary
Haoxiang Cui, Tengda Ma, Baimei Tan, Xiaoqin Sun, Zixuan Feng
Summary: The effects of different cleaning solution combinations on removing nicotinic acid (NA) contamination on Co surface were investigated. It was found that the combination of 0.15 wt% EDTA and 0.15 wt% TMAH had the optimal removal effect and could significantly remove NA contamination on Co surface.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
(2022)
Article
Engineering, Electrical & Electronic
Hong Jin Kim, Mark Rovereto
Summary: This paper investigates the generation of defects during the in-situ cleaning process of copper CMP, with a focus on cross contamination by the brush cleaning process. The experimental results underscore the critical role of surface charge variation during the brush cleaning process in defect generation.
MICROELECTRONIC ENGINEERING
(2022)
Article
Materials Science, Multidisciplinary
Madeeha Riaz, Manahil Najam, Hina Imtiaz, Farooq Bashir, Tousif Hussain
Summary: This study focuses on the structural and biological analysis of Zn-Cu based biodegradable alloys for orthopedic applications. The results indicate that the alloys have good electrical conductivity and biocompatibility, with potential for promoting bone growth and healing process. Additionally, the alloys exhibit a low corrosion rate and improved corrosion resistance.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Rijo Rajeev, Sk Safikul Islam, Anitha Varghese, Gurumurthy Hegde, Suryasarathi Bose
Summary: In this study, a facile and selective electrochemical sensor was developed for the sensing of guanosine. The sensor utilized a unique porous structure and ordered framework, enabling linear detection of guanosine concentration in the range of 0.123-720 μM under specific conditions.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Rafael V. M. Freire, Dominique Celeste de A. Dias, Jose Yago Rodrigues Silva, Dayane Kelly Dias do Nascimento Santos, Larissa T. Jesus, Ricardo O. Freire, Severino A. Junior
Summary: This study reports the extraction and isolation of euphol from nature, its adsorption in nanosized ZIF-8, and the efficacy of this system against cancer cells. Experimental and simulation results show that ZIF-8 can enhance the effectiveness of euphol against cancer cells and selectively target cancer cells.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Manal A. Awad, Awatif A. Hendi, Maha M. Almoneef, Maymunah Alwehaibi, Khalid M. Ortashi, Wadha Alenazi, Fatimah S. Alfaifi, Shareefa Alahmariye, Asma Alangery, Warda Ali Alghoubiri, Haia Aldosari
Summary: In this study, magnesium-doped zinc oxide nanoparticles were synthesized and characterized. The research findings show that magnesium doping can alter the crystal structure and optical properties of zinc oxide, while enhancing its dielectric constant.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
F. J. Willars-Rodriguez, I. R. Chaverz-Urbiola, M. A. Hernandez-Landaverde, A. Zavala-Franco, E. A. Chavez-Urbiola, P. Vorobiev, Yu V. Vorobiev
Summary: This study focuses on manganese doped CdS thin films synthesized by chemical bath deposition. The incorporation of Mn2+ cations in CdS was found to influence the crystalline structure, morphology, and optoelectronic properties. Doped thin films exhibited a uniform hexagonal structure, changed growth orientation, and showed scale-like and needle-like morphologies. The bandgap and rectification speed of Schottky diodes were modified by introducing manganese. This study suggests the potential for affordable high-speed optoelectronic devices.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Mehdi Javidi, Hooman Karimi Abadeh, Fatemeh Namazi, Hamid Reza Yazdanpanah, Narjes Shirvani Shiri
Summary: This study investigated the synergistic effect of temperature, solution velocity, and sulphuric acid concentration on the corrosion behavior of carbon steel using response surface methodology. The results showed that temperature affected anodic reactions, solution velocity influenced cathodic reactions, and acid concentration altered the corrosion mechanisms by changing the properties of the surface layer.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
R. Sakthivel, Thirumoorthy Kulandaivel, Kirankumar Venkatesan Savunthari, K. Mohanraj, Hans-Uwe Dahms, Aswin kumar Anbalagan, Manjunath Rangasamy, Kien-Voon Kong
Summary: In this study, saturated fatty acids were incorporated with silane to modify viscose fabric, resulting in superhydrophobic and superoleophilic properties. The modified fabric showed excellent separation efficiency for oil and organic solvents, with high absorption capacity. The modified fabric also exhibited durability and retained its properties in harsh conditions.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Wei Zhang, Hong Lei, Wenqing Liu, Zefang Zhang, Yi Chen, Xiaogang Hu, Xiangshan Ye
Summary: In this study, EDTA-grafted alumina composite abrasives were produced by a two-step process for the CMP of sapphire substrates. Experimental results showed that the modified abrasives exhibited better dispersion properties and significantly improved polishing efficiency, with higher material removal rates and lower surface roughness. The combination of chemical reaction and mechanical action enhanced the CMP performance.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Shumaila Rafaqat, Bushra Perveen, Warda Raqba, Warda Imran, Arshad Hussain, Naeem Ali
Summary: This study developed a MnP-based biosensor for quantitative measurement of dye concentrations using electrochemical signals. The effects of two different dyes on MnP activity were investigated, with one dye showing inhibitory effects and the other dye having no effect. The study demonstrates the potential application of enzyme-based biosensors in dye detection and toxicological monitoring.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Jinyan Shi, Oguzhan Yavuz Bayraktar, Baris Bayrak, Burak Bodur, Ali Oz, Gokhan Kaplan, Abdulkadir Cuneyt Aydin
Summary: The elemental composition of precursors is crucial for the performance development of geopolymers. The use of lime instead of metakaolin increases the fluidity and mechanical properties of geopolymers, while the addition of gypsum decreases them. Furthermore, higher lime content exacerbates the negative effect of gypsum.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Aayush Gupta, Kaveri Ajravat, Loveleen K. Brar, O. P. Pandey, Pandey Rajagopalan
Summary: This study focuses on the performance of Mn3O4-ZnO composite material in wastewater treatment and energy storage applications, and presents a detailed comparative analysis. Results show that the composite material with equal concentrations of Mn3O4 and ZnO exhibits excellent photocatalytic activity and high capacitance.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
V. Murugabalaji, Matruprasad Rout, Harsh Soni, Biranchi Narayan Sahoo
Summary: This study focuses on the corrosion characteristics of AA 7075 and AA 7075 based hybrid composite fabricated using stir casting and hot rolling techniques. The results show that the hybrid composite produced by hot cross rolling exhibits better corrosion resistance compared to the base metal. The addition of a small amount of graphite improves the bonding between the matrix and reinforcements, and the hot cross rolling enhances this bonding, leading to the formation of a strong passivation oxide layer and increased charge transfer resistance, thereby improving corrosion resistance.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Fangkun Ning, Qinghao Shi, Shuping Kong, Weitao Jia, Lifeng Ma
Summary: The paper investigates a new method of rolling sheets with variable chamfering amounts in both the transversal and normal directions. The feasibility of the technological process was tested through simulation and compared with experimental results. Three important process parameters, temperature, stress, and flow velocity, were used to evaluate the effects on chamfering amount before determining the optimal angle. The spread formula for evaluating the shape quality of the plate after ECR was obtained through testing and theory.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
Aqeel Abbas, M. A. Hussein, Mohamed Javid
Summary: In this study, the AM60 magnesium alloy was processed using high-energy ball milling, and the results showed that different reinforcement agents had certain effects on particle size, crystallite size, lattice strain, and dislocation density.
MATERIALS CHEMISTRY AND PHYSICS
(2024)
Article
Materials Science, Multidisciplinary
D. S. Mahmoud, E. M. Eldesouki, W. M. Abd El-Gawad
Summary: The development of flexible and lightweight microwave-absorbing materials has become a trendy topic. This study focuses on enhancing the microwave-absorbing performance of butadiene-acrylonitrile rubber (NBR) by incorporating novel reinforcing nanofillers. The results show that the NBR nanocomposite with a loading of 16 parts per hundred rubber (phr) of LiFe 20%/Si has the best microwave-absorbing performance.
MATERIALS CHEMISTRY AND PHYSICS
(2024)