Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification

标题
Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification
作者
关键词
-
出版物
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 33, Issue 2, Pages 258-266
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2020-02-20
DOI
10.1109/tsm.2020.2974867

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