3-D NAND Technology Achievements and Future Scaling Perspectives

Published 2020 View Full Article

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Title
3-D NAND Technology Achievements and Future Scaling Perspectives
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 4, Pages 1373-1381
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-02-13
DOI
10.1109/ted.2020.2968079

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