Quality factor boosting of bulk acoustic wave resonators based on a two dimensional array of high-Q resonant tanks

Exploiting elastic anharmonicity in aluminum nitride matrix for phase-synchronous frequency reference generation

(2018) Mayur Ghatge et al.   APPLIED PHYSICS LETTERS

Piezoelectric-Based Support Transducer Design to Enable High-Performance Bulk Mode Resonators

(2018) Gayathri Pillai et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators

(2017) Jie Zou et al.   IEEE ELECTRON DEVICE LETTERS

Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry

(2017) Xiaoyue Jiang et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Piezoelectric Bulk Mode Disk Resonator Post-Processed for Enhanced Quality Factor Performance

(2017) Mohannad Y. Elsayed et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Study of a 10 MHz MEMS oscillator with a TPoS resonator

(2017) Xinyi Li et al.   SENSORS AND ACTUATORS A-PHYSICAL

Planar ring-shaped phononic crystal anchoring boundaries for enhancing the quality factor of Lamb mode resonators

(2016) L. Binci et al.   APPLIED PHYSICS LETTERS

Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing

(2014) Jenna L. Fu et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators

(2010) Chengjie Zuo et al.   SENSORS AND ACTUATORS A-PHYSICAL

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications

(2009) R. Abdolvand et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL