Ion beam planarization of optical aluminum surfaces

Finishing of metal optics by ion beam technologies

(2019) Jens Bauer   OPTICAL ENGINEERING

Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces

(2018) Jens Bauer et al.   Journal of Astronomical Telescopes Instruments and Systems

Reactive ion beam figuring of optical aluminium surfaces

(2017) Jens Bauer et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Characteristics of diamond turned NiP smoothed with ion beam planarization technique

(2017) Yaguo Li et al.   Journal of the European Optical Society-Rapid Publications

Ion beam planarization of diamond turned surfaces with various roughness profiles

(2017) Yaguo Li et al.   OPTICS EXPRESS

Large area smoothing of surfaces by ion bombardment: fundamentals and applications

(2009) F Frost et al.   JOURNAL OF PHYSICS-CONDENSED MATTER

Characterization of the morphology and composition of commercial negative resists used for lithographic processes

(2008) B.-E. Schuster et al.   ANALYTICAL AND BIOANALYTICAL CHEMISTRY

Study of 193 nm photoresist degradation during short time fluorocarbon plasma exposure. I. Studies of modified layer formation

(2008) M. Sumiya et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Study of 193nm photoresist degradation during short time fluorocarbon plasma exposure III. Effect of fluorocarbon film and initial surface condition on photoresist degradation

(2008) M. Sumiya et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B