Precursor nature and molarities effect on the optical, structural, morphological, and electrical properties of TiO2 thin films deposited by spray pyrolysis

Titanium oxide thin films were deposited by a simple and low-cost spray pyrolysis technique using two different precursors: Titanium chloride (TiCl3) and Titanium Tetra-isopropoxide (TTIP) on glass substrates. X-ray diffraction shows that most of the TiO2 thin films are amorphous in structure. The optical transmittance of the sprayed TiO2 films deposited from Titanium chloride is in the range of 80 % and for the films deposited from TTIP, it attains 90 % in the visible region. The optical band gap energies of the films deposited from TiCl3 and TTIP are about 3.5 and 3.7 eV respectively. The electrical resistivity of the films varies from 3.2*10(3) to 4.6*10(4) (Omega.cm) for the films prepared from TiCl3 precursor and 9.4*10(2) to 6.5*10(3)(Omega.cm) for the films prepared from TTIP precursor.