Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges
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Title
Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges
Authors
Keywords
-
Journal
Journal of Instrumentation
Volume 14, Issue 12, Pages C12019-C12019
Publisher
IOP Publishing
Online
2019-12-19
DOI
10.1088/1748-0221/14/12/c12019
References
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- Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge
- (2008) D L Crintea et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
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