Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge

Published 2008 View Full Article

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Title
Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 8, Pages 082003
Publisher
IOP Publishing
Online
2008-03-13
DOI
10.1088/0022-3727/41/8/082003

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