Journal
APPLIED PHYSICS EXPRESS
Volume 13, Issue 2, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.35848/1882-0786/ab6ddd
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Funding
- ECSEL Joint Undertaking (JU) [826392]
- European Union
- project Novel vertical GaN-devices for next generation power conversion, NoveGaN
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We present a first study of threshold voltage instabilities of semi-vertical GaN-on-Si trench-MOSFETs, based on double pulsed, threshold voltage transient, and UV-assisted C-V analysis. Under positive gate stress, small negative V-th shifts (low stress) and a positive V-th shifts (high stress) are observed, ascribed to trapping within the insulator and at the metal/insulator interface. Trapping effects are eliminated through exposure to UV light; wavelength-dependent analysis extracts the threshold de-trapping energy approximate to 2.95 eV. UV-assisted CV measurements describe the distribution of states at the GaN/Al2O3 interface. The described methodology provides an understanding and assessment of trapping mechanisms in vertical GaN transistors. (C) 2020 The Japan Society of Applied Physics
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