Numerical Modelling of Vibration Characteristics of a Partially Metallized Micro Electromechanical System Resonator Disc

Published 2020 View Full Article

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Title
Numerical Modelling of Vibration Characteristics of a Partially Metallized Micro Electromechanical System Resonator Disc
Authors
Keywords
-
Journal
ACTA ACUSTICA UNITED WITH ACUSTICA
Volume 105, Issue 6, Pages 1164-1172
Publisher
S. Hirzel Verlag
Online
2020-01-09
DOI
10.3813/aaa.919393

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