Numerical Modelling of Vibration Characteristics of a Partially Metallized Micro Electromechanical System Resonator Disc

标题
Numerical Modelling of Vibration Characteristics of a Partially Metallized Micro Electromechanical System Resonator Disc
作者
关键词
-
出版物
ACTA ACUSTICA UNITED WITH ACUSTICA
Volume 105, Issue 6, Pages 1164-1172
出版商
S. Hirzel Verlag
发表日期
2020-01-09
DOI
10.3813/aaa.919393

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