Do Chemical Effects Affect the Accumulation of Structural Damage during the Implantation of Fluorine Ions into GaN?

Title
Do Chemical Effects Affect the Accumulation of Structural Damage during the Implantation of Fluorine Ions into GaN?
Authors
Keywords
-
Journal
SEMICONDUCTORS
Volume 53, Issue 11, Pages 1415-1418
Publisher
Pleiades Publishing Ltd
Online
2019-11-06
DOI
10.1134/s1063782619110204

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