Metasurface-generated complex 3-dimensional optical fields for interference lithography
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Title
Metasurface-generated complex 3-dimensional optical fields for interference lithography
Authors
Keywords
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Journal
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
Volume 116, Issue 43, Pages 21379-21384
Publisher
Proceedings of the National Academy of Sciences
Online
2019-10-08
DOI
10.1073/pnas.1908382116
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