Metasurface-generated complex 3-dimensional optical fields for interference lithography
出版年份 2019 全文链接
标题
Metasurface-generated complex 3-dimensional optical fields for interference lithography
作者
关键词
-
出版物
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
Volume 116, Issue 43, Pages 21379-21384
出版商
Proceedings of the National Academy of Sciences
发表日期
2019-10-08
DOI
10.1073/pnas.1908382116
参考文献
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