Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics
Published 2019 View Full Article
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Title
Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics
Authors
Keywords
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Journal
Microsystems & Nanoengineering
Volume 5, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-08-26
DOI
10.1038/s41378-019-0077-y
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