Theoretical study of subwavelength circular grating fabrication based on continuously exposed surface plasmon interference lithography

Published 2019 View Full Article

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Title
Theoretical study of subwavelength circular grating fabrication based on continuously exposed surface plasmon interference lithography
Authors
Keywords
Nanolithography, Subwavelength circular grating, Surface plasmon
Journal
Results in Physics
Volume 14, Issue -, Pages 102446
Publisher
Elsevier BV
Online
2019-06-15
DOI
10.1016/j.rinp.2019.102446

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