Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference

Title
Theoretical study for fabricating elliptical subwavelength nanohole arrays by higher-order waveguide-mode interference
Authors
Keywords
Elliptical subwavelength nanohole arrays, Lithography, Waveguide mode interference, Asymmetric metal-cladding dielectric waveguide
Journal
Results in Physics
Volume 14, Issue -, Pages 102460
Publisher
Elsevier BV
Online
2019-06-21
DOI
10.1016/j.rinp.2019.102460

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